介绍了碳纳米管(CNTs)/聚合物复合材料分散性、定向排布和组装方面的研究进展, 并利用双光子聚合(TPP)激光直写技术, 实现了多壁碳纳米管(MWNTs)在三维空间的定向排布和分子组装。通过加入硫醇分子, 提升了MWNTs/聚合物复合材料中CNTs的分散性和掺杂浓度, 增强了CNTs/聚合物复合材料在电学、光学、力学方面的性能, 并成功实现了三维CNTs功能器件的制造。研究结果表明, 通过将TPP激光直写技术与热退火工艺相结合, 可以实现对CNTs簇排列方向和位置的精确控制。

Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, roomtemperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laserbased micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.